Investigation of thermal treatment on improving the performance behavior of Si PIN alpha radiation detectors

Daraee, M. and Araghi, A. and Sadeghi, M. and Hashemizadeh, A. (2019) Investigation of thermal treatment on improving the performance behavior of Si PIN alpha radiation detectors. Optik, 184. pp. 364-369.

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Abstract

The silicon-based PIN-type photodiode was designed and fabricated employing conventional bipolar planar technology using different annealing process to reduce the leakage current and detector energy resolution. In this process the effects of the Annealing and gas flow rate on the detector electrical properties such as capacitance-voltage (C�V) of MOS capacitors and current-voltage (I�V) of diodes and alpha spectral measurement are specified. Silicon PIN radiation detectors are made on four similar fabrication process with different post thermal annealing at constant temperature and different hydrogen gas flow (10 sccm�60 sccm). The study results proves that the detector with 15 sccm hydrogen gas flow shows lower leakage current due to the lower remained interface traps density at the Si/SiO 2 interface. Si PIN diodes were fabricated, by considering all the important aspects discussed in this paper, and consequently an excellent spectral response was observed. © 2019 Elsevier GmbH

Item Type: Article
Additional Information: cited By 0
Subjects: QT Physiology
Depositing User: eprints admin
Date Deposited: 06 Oct 2020 08:13
Last Modified: 06 Oct 2020 08:13
URI: http://eprints.iums.ac.ir/id/eprint/13535

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